描述
投运前检查设备所在的环境的温度、湿度和清洁度情况,检查电子设备间电缆孔洞封堵完好,还要检查各路电源熔丝符合要求,各控制站柜、I/O柜和现场过渡端子柜的柜号、名称标志明确,并内附端子排接线图。各控制站柜、I/O柜和现场过渡端子柜的个档公用电源线、接地线、照明线应连接完好、正确、牢固;附件齐全、完好。柜内照明正常。由现场进入中间过渡端子柜、现场控制站机柜的各类信号线、信号屏蔽地线、保护地线及电源线,应连接完好、正确、牢固、美观;电缆牌号和接线号齐全、清楚。
Leybold TRIVAC D65BCS / WS501 Roughing Pump and Roots B
Tuthill vacuum air blower pump compressor 7018-21L2++++
Oerlikon Leybold TW 701 Vacuum Turbo Pump
Rebuilt by Oerlikon Leybold with a one year warranty.
Edwards iQDP80 Dry Semiconductor Vacuum Pump w iQMB-500
APPLIED MATERIALS, AMAT 0010-21668 PVD magnet. New
NASH TCM3 VACUUM PUMP 30 HP
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EDWARDS EXP TURBO SYSTEM
Edwards Vacuum EPX 180L Dry Pump 400V, 6 month Warranty