The emergence of micro-robots is inseparable from the development of micro-electromechanical systems(MEMS).It can be said that micro-robots are programmable and general-purpose micro-electromechanical systems engineering.In the late 1980s,with the rapid development of large-scale and ultra-large-scale integrated circuits,the cross-integration of microelectronics technology,mechanics,optics and other disciplines promoted the rapid development of MEMS technology.
Like MEMS,the development of micro-robots is closely related to the development of micro-actuators.In 1987,the University of California,Berkeley made a breakthrough achievement that caused a sensation in the world.For the first time,it developed a miniature static motor with a rotor diameter of 60~120μm.Subsequently,MIT also developed a 100μm static motor.
微型机器人出现是和微机电系统(MEMS)的发展是分不开的,可以说微型机器人就是可编程通用的微型机电系统工程。20世纪80年代后期,随着大规模和超大规模集成电路的迅速发展,微电子技术与机械、光学等学科的交叉融合促进了MEMS技术的迅速发展。
和微机电系统一样,微型机器人的发展和微驱动器的发展也是紧密相关的。1987年美国加州大学伯克利分校取得一项轰动世界的突破性成就,首次研制出了转子直径为60~120μm的微型静电动机,随后MIT也研制出了100μm的静电动机
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