描述
各个硬件设备
操作员站、工程师站、网络交换机、服务器主机、系统显示器等采用外壳接地或直接将电源地线连接至电气接地网。
VEECO DIGITAL INSTRUMENTS Dimension 3100
Seiko SIR3000/SIR 3000 FIB Photomask Mask Repair System
SFI Endeavor 8600 Cluster Sputtering Tool
PlasmaTherm Unaxis Dual SLR 700 Etch System (RIE/PE)
Oxford Plasmalab System 90 Etch/Plasma RIE/PECVD System
Obducat NIL-4 Nano-Imprinter/Imprint Lithography System