描述
若波动数据工艺上彼此并无直接影响,则可能为微机某卡件发生故障,立即将相关自调系统打到手动调节,必要时到现场进行调节,同时,通知微机及仪表人员检查。
COMDEL CPS-500AS RF POWER SOURCE AMAT P/N 0190-13320
AMAT PART # 0200-20060 INSULATING QUARTZ 6″ SMF PC11
THERMCO PCB ASSEMBLY PART # 110568-005 Z-80 PROCESSOR
NOVELLUS NICKEL SPINDLE SHAFT
AMAT PART # 0200-35145 ADAPTER WINDOW 2mm RP CHAMBER
ADVANCED ENERGY PDX 500 RF GENERATOR
LAM PART # 770-008341-002 PNEUMATIC CYLINDER
AMAT PART #0200-20074 DOOR PRECLEAN CHAMBER QUARTZ
AMAT PART # 0020-24435 INSULATOR QUARTZ 8″