描述
若波动数据工艺上彼此并无直接影响,则可能为微机某卡件发生故障,立即将相关自调系统打到手动调节,必要时到现场进行调节,同时,通知微机及仪表人员检查。
LAM KIT, CRTSY, REMOVAL, TUN ESC 843-02246-002
LAM Kit, crtsy, cal, te 843-022046-001 REV B
SIEMENS 6ES5242-1AA32 SIMATIC S5
Ushio Control Unit HB-25103BY-C
ASYST INDEXER MASTER CONTROLLER
CPU, PROG. EPROM DC:5/99855-010409-007
LAM RING FOCUS, THIN EDGE, 8′ 4428 716-011638-008
DYNATRONIX PROGRAMABLE PULSE POWER SUPPLY, 104/1-1-3