描述
当出现较大规模的硬件故障时,最大的可能是由于DCS系统环境维护不力而造成的系统运故障,除当时采取紧急备件更换和系统清扫工作外,还要及时和厂家取得联系,由厂家专业技术支持工程师进一步确认和排除故障。
Advanced Energy PDW 2200 RF Generator 3156011-000B
GENESIS HC70 HELIUM COMPRESSOR
Rigaku Flange mount Hollow shaft rotary feedthroughs
BidTec SP100 resist spinner
Excellent condtion , fully operational
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Brooks Automation Acutran/Aquatran Scara Arm for 300mm