描述
运行前必须检查各通信口、I/O功能、控制算法功能是否满足要求;在工程师站上对模件状态进行检查符合要求;在模件内装入组态,检查是否正确。
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AMAT PART # 0200-20060 INSULATING QUARTZ 6″ SMF PC11
Nordiko PVD substrate heater assembly large size A04203
0010-09416 RF Match Etch Applied Materials P5000
Primatics DMC1800 Multi-axis Motion Control System
AMAT 0150-21665 CABLE ASSY, N(M), R/A TO N(M), STR RG-2
Nikon Precision PCB WL2CNT 4S014-051-2