描述
DCS系统接地方式
1利用电气接地网作为DCS接地网,即与电气接地网共地;
2设DCS系统专用独立的接地网;
3设DCS专用接地网,经接地线、再接至电气接地网。
Lam research 810-17031-1 rev. 7 with 810-17052-11
Varian Z80A processor card C666244
NuDAQ PCI-6208 Rev. A3
Linear scale V81-301061-3 card
LEP MCMSE 73000500
Balzers BG527072-U BG 527 072-U card
SMC Pneumatic Rotary Actuator 11-MSQB20R-M9B