描述
ESD也不单是实现联锁关系,它应该凌驾于生产过程控制之上,具有独立性,这样降低了两者同时失效的概率,ESD的安全等级要高于DCS。DCS主要是:动态控制,故障自动显示,维修时间不太关键,可以进行自动/手动切换;ESD主要是:静态监测、保护,必须测试潜在故障,维修时间非常关键,必须始终在线,不允许离线。
Quincy Vacuum Model QSVB10ANA3G
Pfeiffer Vacuum Turbo Pump Controller TCM 1601 Varian
Alcatel 2100AC Rotary Vane Vacuum Pump 90.0 CFM
Varian TV551 Turbomolecular Vacuum Pump 550.0 LPS
Stokes 310-401 Direct Drive Blower, 400 CFM, 2 HP
Stokes Pennwalt Micro Vac 148-10 and Blower 306-401
Vacuum pump and blower combination with motors
212-H-11 STOKES VACUUM PUMP, 150 CFM, 5HP