描述
判断波动数据是否为工艺上相关参数,若是相关参数则通知仪表及微机人员检查,看是否某调节系统波动引起相关参数变化,同时将相关调节系统打到手动状态,必要时到现场进行调节。
N211411A SC101/5 PCB
N209509A CP161/15 PCB
Micro memory MM-6300 MM6300 KLA 750-400399
PC/56001-27 DSP56001 PROCESSOR CARD LSI160590
Force SYS68K/SASI-1 Lam research 810-017035-001 Rev. B
Force SYS68K/SASI-1 P/N: 300000
Prior G328P2 Video Fibre Viewer
Jeol PH01134-1 AL-Y use on Jeol 5900 Lab6 SEM