描述
保持环境有一定的湿度。特别北方地区或在干燥的冬季,因静电产生故障的事例要远远大于在东南沿海地区或其他季节,所以在一些重要场所,如计算机机房、实验室、电子仪器的装调车间应考虑保持一定湿度的问题,特别是对那些封闭形的空调房间,更应有一定控制湿度的设备。
Kinetic Systems Vibraplane 305041-03-0013S
Leybold WS151 Vacuum Pump Blower
Tokyo Electron Cover Bellows A (DRM2) ***NEW***
Applied Materials LSI Slit Valve Liner P/N 0020-19003
Applied Materials LSI Slit Valve Filler P/N 0021-09718
Leybold Pump P/N 21945 Removed from Leybold Ultratest F
Leybold Pump P/N 590 29113 from Leybold Ultratest F
Millipore Waferpure Megaline Cat No. WPLV202SI
NGK Ultra High Purity Water Manifold Valve Model CB-573
IAS Integrated Air Systems Fan Filter Hepa Filter Unit