描述
在系统应用软件中采纳智能控制算法,如模糊逻辑、专家系统、遗传算法、神经元网络等高级控制算法,形成具有人工智能的控制模块及网络系统,提高系统的控制水平。
Applied Materials LSI Slit Valve Liner P/N 0020-19003
Applied Materials LSI Slit Valve Filler P/N 0021-09718
Leybold Pump P/N 21945 Removed from Leybold Ultratest F
Leybold Pump P/N 590 29113 from Leybold Ultratest F
Millipore Waferpure Megaline Cat No. WPLV202SI
NGK Ultra High Purity Water Manifold Valve Model CB-573
IAS Integrated Air Systems Fan Filter Hepa Filter Unit
Nanometrics Power Distribution Assembly