描述
控制操作失灵:是由于球标的操作信号没有正常改变过程通道的状态,造成操作失效,这是2个方面造成的,一个方面是软件缺陷,另一方面是硬件本身故障的状态针对这样的缺陷通常做法检查过程通道功能正常后,再检查操作远必要时进行重起初始操作
HPS Elbow 90 Degree, RAD, MF80-CUS SPC
HPS / MKS KF50 Valve with Solenoid
Nanometrics Wafer Handler P/N 8200-0366
Nanometrics Sublimator Assy. Control Box
Laser Communications Module Model LS4-1 ***NEW***
Hi-Res PCB CRT for Scanning Electron Microscope
VEXTA 2-Phase Stepping Motor w/ VG Throttle Valve
TEGAL Electrical Distribution Junction Box 208V, 40Amps
NOR-CAL Isolation Valve – Model ILVP-1502-NWB