描述
为证实干扰源是由变频器产生,我们将该变频器的出线电缆从铁氧体环中穿过,并将变频器至dcs的信号线与变频器的输入、输出线尽量远离并交叉。通过以上措施,dcs上该点的oop报警频率有一定程度下降。这就证实了干扰源来自变频器。那么下一步的措施就是尽量减少变频器的干扰。
Leybold WS151 Vacuum Pump Blower
Tokyo Electron Cover Bellows A (DRM2) ***NEW***
Applied Materials LSI Slit Valve Liner P/N 0020-19003
Applied Materials LSI Slit Valve Filler P/N 0021-09718
Leybold Pump P/N 21945 Removed from Leybold Ultratest F
Leybold Pump P/N 590 29113 from Leybold Ultratest F
Millipore Waferpure Megaline Cat No. WPLV202SI
NGK Ultra High Purity Water Manifold Valve Model CB-573
IAS Integrated Air Systems Fan Filter Hepa Filter Unit
Nanometrics Power Distribution Assembly