描述
检查环境条件。电子设备室、工程师室内和环境温度、湿度、清洁度,应符合有关规程或生产厂家的规定;集控室内光线充足,具备操作员操作监视的条件。
Rotary Vacuum Pump 5 hp 1.15 M3/sec 0.09 Torr UG TRB325
Rotary Vacuum Pump 5.4hp TRB325 Unozawa 1.15m3/s .09tor
Edwards QDP80 DryStar Dry Vacuum Pump
Varian DVP 500 Dry Oil-Free Fore Vacuum Pump 16 cfm
Duo Seal Vacuum Pump Model 1397
Sonic 200 Air Systems Blower 30HP Vacuum Pump Regen
Ebara 50X20 (50 X 20) Dry Vacuum Pump Package