描述
为了保证容错系统具有高可靠性,必须尽量减少系统的平均修复时间MTBR。要做到这一点,在设计上应努力提高单元的独立性、可修复性、故障可维护性。实现故障部件的在线维护和更换也是冗余技术的重要组成部分,它是实现控制系统故障部件快速修复技术的关键。部件的热插拔功能可以在不中断系统正常控制功能的情况下增加或更换组件,使系统平稳地运行。
AC LINE FILTER, TRI-MAG.Inc. SF-1579 – REFURBISHED
CONTROLLER NOVELLUS 270019800 – REFURBISHED
CONTROLLER NOVELLUS 27017400 – REFURBISHED
HV GATE VALVE VAT DN100 PNEUMATIC SERIES 14
POWER SUPPLY ASTEC LPS 252 – REFURBISHED
PRINTED CIRCUIT BOARD, AMAT 0100-09099 – REFURBISHED
PRINTED CIRCUIT BOARD, AMAT 0100-35180 – REFURBISHED
PRINTED CIRCUIT BOARD, AMAT 0100-76258 REV. B
TRANSDUCER VIATRAN 376 – NEW
VACUUM VALVE, MKS 253B-2-50-2, Exhaust throtte valve
VACUUM VALVE, MKS, Exhaust throtte valve, KF50
VACUUM GAUGE CONTROLLER GRANVILLE-PHILLIPS 375