描述
整定PID参数时,一定要力求工况稳定,尤其是衰减曲线法整定PID,否则工艺中的其他干扰进入系统,就不能得到正确的4:1~10:1衰减比例度和衰减周期,就不能求得最佳PID参数。
MARCH AP-1000 PLASMA TREATMENT SYSTEM
KULICKE & SOFFA 8068 TRITON RDA WEDGE BONDER
JMAR MIRAGE, PRECISION LASER MEASUREMENT SYSTEM
NEW MKS MICROVISION PLUS IP RGA RESIDUAL GAS ANALYSER
GENMARK GENCOBOT 4/3L ROBOT AND SMALL CONTROLLER WAFER
DAINIPPON SCREEN MFG CO LTD SSW-629-B WAFER SCRUBBER