描述
此时,查看控制站电源指示灯是否正常,卡件诊断指示灯有无故障红灯,绿灯表示卡件正常工作,若以上都正常,则可以确定控制站工作正常,自调系统工作正常,只是操作工暂时看不到监控画面,且不能对现场进行遥控操作,立即通知微机维修人员进行维修,并到现场进行监控。
Asyst Fan / Filter Assembly P/N C0094-0948
Spin Rinse Dryer Semitool 270 Part
Ebara Vacuum Pump Model 50X20
Optical Sensor Interface Board AII-CPU-03 9ECU-101A
Osaka Vacuum Ltd. Heater Controller REX-C100
Filter Pump Industries Model PM-1/2 RPM 1/2 HP – USED
Quiet Chuck DC Controller 490 w/ Athena Controller
High Purity Semiconductor Quartz Drip Tray **NEW**