描述
控制系统的硬件一定要具有高可靠性,在电子元器件上的生产工艺各环节上采用了成熟技术,电子模件最好能热拔插。控制器的运算和存储能力要足够,IO卡件具有很强的抗干扰能力。
Quiet Chuck DC Controller 490 w/ Athena Controller
High Purity Semiconductor Quartz Drip Tray **NEW**
High Purity Semiconductor Quartz Process Fixture **NEW*
Huntington Right Angle Pneumatic Elastomer Sealed Valve
Carten Ultra-High Purity Diaphragm 3-way Valve **NEW**
Applied Materials 5 Ph Stepper Motor Driver Interface
Athena Temperature Controller Model 4000-T-E-30-79