描述
控制系统从结构上要充分地采用了冗余技术。对于控制系统的控制器、网络通讯等必须冗余,且各冗余设备之间必须能实现无扰切换.采用冗余结构不仅能避免控制系统的局部故障扩大事故,保证机组安全稳定运行,同时也保证设备故障的在线排除,从而消除事故隐患。
HPS Elbow 90 Degree, RAD, MF80-CUS SPC
HPS / MKS KF50 Valve with Solenoid
Nanometrics Wafer Handler P/N 8200-0366
Nanometrics Sublimator Assy. Control Box
Laser Communications Module Model LS4-1 ***NEW***
Hi-Res PCB CRT for Scanning Electron Microscope
VEXTA 2-Phase Stepping Motor w/ VG Throttle Valve
TEGAL Electrical Distribution Junction Box 208V, 40Amps
NOR-CAL Isolation Valve – Model ILVP-1502-NWB
Oriel 68851 Photofeedback Light Intensity Controller