描述
小型化的PLC将向更专业化的使用角度发展,比如功能更加有针对性、对应用的环境更有针对性等等。大型的PLC与DCS的界线逐步淡化,直至完全融和。
JEOL JWS 7700
LAM 4420 – Polysilicon Etcher
ADE – 780 MRT – Digital Measurement System
TEL Act 8 SOD Track Photolithograph
Novellus C1-SN 95-09-962
Novellus C1-SN 89-11-062
Novellus C1-SN 96-47-2195
Novellus C1-Tungsten-Japan
APPLIED MATERIALS – P5000 CVD CHAMBER BODY