描述
冷却风扇故障导致主机过热,或负荷过重造成。可首先检查主机本身的温升情况,其次用替代法检查硬盘、主机卡件等,以确定故障部分。
KLA-Tencor Alpha-Step 100 Profiler and Printer
KLA-Tencor AIT 2 PSF Driver Board 0031750-000 working
KLA-Tencor AIT 2 Fastcom 8 RS-232 Adapter 542288
KLA-Tencor 2365 EMO Control Module 710-734976-001
KLA-Tencor AIT 2 Lens Filter Assy. 392855 working
KLA-Tencor AIT 2 Mirror Assy. 392804 working
Aerotech KLA-Tencor Aerotech DR 500 Controller 510432