描述
在现场就地安装控制器,不仅节省了输入输出电缆的长度,同时减少了传输信号的干扰。在功能上各控制器各自为政,各自独立完成各自的功能,使系统故障分散,从而使系统可靠性大为提高。
Seiko Seiki STP-301CB1 Turbo Pump & SCU-21D controller
ADVANCED ENERGY RFG-1250 HALO
DPS II RF Source Matching Network (0190-15168)
ADVANCED ENERGY PDW 2200 AE PDW 2200 LAM 660-015516-014
COMDEL CPS1001S 13.56mhz RF GENERATOR P/N 0190-70099
COMDEL CLX-2500 RF GENERATOR
COMDEL CLX2500 RF GENERATOR PART # FP1335R4
ADVANCED ENERGY PDW 2200 AE 3156011 Lam 853-015516-002
COMDEL CX1250S RF POWER SUPPLY
COMDEL CPS-500AS RF POWER SOURCE AMAT P/N 0190-13320